1. Grid line specifications on the workbench surface: 50x50±0.05mm; 1mm scale lines on the two adjacent sides of the workbench in the X and Y directions

2. Aperture and accuracy: φ16.16±0.03mm

3. Hole spacing: 50±0.03mm

4. Flatness: 0.1mm/m2

5. Verticality: 0.1mm/200mm

6. Parallelism: 0.1mm/1000mm

Parallelism and verticality (adjacent sides): 0.1/1000mm